Document number SPEC-6517BC
Specifications are subject to change without notice.
VOLTS
| Range | 6½-digit resolution | Accuracy (1 year)1 18 °C to 28 °C ± (% reading + offset) |
Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C |
| 2 V | 1 µV | 0.025 + 40 µV | 0.003 + 20 µV |
| 20 V | 10 µV | 0.025 + 300 µV | 0.002 + 100 µV |
| 200 V | 100 µV | 0.06 + 3 mV | 0.002 + 1 mV |
1 When properly zeroed, 6½-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.
NMRR: 2 V and 20 V range > 60 dB, 200 V range > 55 dB. 50 Hz or 60 Hz2
CMRR: > 120 dB at DC, 50 Hz or 60 Hz
Input Impedance: > 200 TΩ in parallel with 20 pF, < 2 pF guarded (1 MΩ with zero check on)
Small signal bandwidth at preamplifier output: Typically 100 kHz (–3 dB)
2 Line sync on.
AMPS
| Range | 6½-digit resolution | Accuracy (1 year)1 18 °C to 28 °C ± (% reading + offset) |
Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C |
| 20 pA | 10 aA3 | 1 + 3 fA | 0.1 + 500 aA |
| 200 pA | 100 aA3 | 1 + 5 fA | 0.1 + 1 fA |
| 2 nA | 1 fA | 0.2 + 300 fA | 0.1 + 20 fA |
| 20 nA | 10 fA | 0.2 + 500 fA | 0.03 + 100 fA |
| 200 nA | 100 fA | 0.2 + 5 pA | 0.03 + 1 pA |
| 2 µA | 1 pA | 0.1 + 100 pA | 0.005 + 20 pA |
| 20 µA | 10 pA | 0.1 + 500 pA | 0.005 + 100 pA |
| 200 µA | 100 pA | 0.1 + 5 nA | 0.005 + 1 nA |
| 2 mA | 1 nA | 0.1 + 100 nA | 0.008 + 20 nA |
| 20 mA | 10 nA | 0.1 + 500 nA | 0.008 + 100 nA |
3 aA = 10–18 A, fA = 10–15 A.
Input bias current noise: < 750 aA peak-peak (capped input), 0.1 Hz to 10 Hz bandwidth, damping on; digital filter = 40 readings, 20 pA range
Input voltage burden at TCAL ± 1 °C: < 20 µV on 20 pA, 2 nA, 20 nA, 2 µA, 20 µA ranges; < 100 µV on 200 pA, 200 nA, 200 µA ranges; < 2 mV on 2 mA range; < 5 mV on 20 mA range
Temperature coefficient of input voltage burden: < 10 µV/°C on pA, nA, µA ranges
Preamplifier settling time (to 10% of final value) typical: 0.5 s (damping off), 2.0 s (damping on) on pA ranges; 15 ms on nA ranges damping off, 1 ms on µA ranges damping off; 500 µs on mA ranges damping off
NMRR: >60 dB on all ranges at 50 Hz or 60 Hz4
COULOMBS
| Range | 6½-digit resolution | Accuracy (1 year)5, 6 18 °C to 28 °C ± (% reading + offset) |
Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C |
| 2 nC | 1 fC | 0.4 + 50 fC | 0.04 + 30 fC |
| 20 nC | 10 fC | 0.4 + 500 fC | 0.04 + 100 fC |
| 200 nC | 100 fC | 0.4 + 5 pC | 0.04 + 1 pC |
| 2 µC | 1 pC | 0.4 + 50 pC | 0.04 + 10 pC |
4 Line sync on.
5 Specifications apply immediately after charge acquisition. Add:
where TA = period of time in seconds between the coulombs zero and measurement, QAV = average charge measured over TA, and RC = 300,000 typical.
6 When properly zeroed, 6½-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.
OHMS
| Range | 6½-digit resolution | Accuracy (1 year)7 (10% to 100% range) 18 °C to 28 °C (1 year) ± (% reading + offset) |
Temperature coefficient (10% to 100% range) 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C |
Auto V source | Amps range |
| 2 MΩ | 1 Ω | 0.125 + 10 Ω | 0.01 + 10 Ω | 40 V | 200 µA |
| 20 MΩ | 10 Ω | 0.125 + 100 Ω | 0.01 + 100 Ω | 40 V | 20 µA |
| 200 MΩ | 100 Ω | 0.15 + 1 kΩ | 0.015 + 1 kΩ | 40 V | 2 µA |
| 2 GΩ | 1 kΩ | 0.225 + 10 kΩ | 0.035 + 10 kΩ | 40 V | 200 nA |
| 20 GΩ | 10 kΩ | 0.225 + 100 kΩ | 0.035 + 100 kΩ | 40 V | 20 nA |
| 200 GΩ | 100 kΩ | 0.35 + 1 MΩ | 0.110 + 1 MΩ | 40 V | 2 nA |
| 2 TΩ | 1 MΩ | 0.35 + 10 MΩ | 0.110 + 10 MΩ | 400 V | 2 nA |
| 20 TΩ | 10 MΩ | 1.025 + 100 MΩ | 0.105 + 100 MΩ | 400 V | 200 pA |
| 200 TΩ | 100 MΩ | 1.15 + 1 GΩ | 0.125 + 1 GΩ | 400 V | 20 pA |
OHMS (alternating polarity method)
The alternating polarity sequence compensates for the background (offset) currents of the material or device under test. Maximum tolerable offset up to full scale of the current range used.
Using Keithley Model 8002A or 8009 fixture
Repeatability: ΔIBG × R/VALT + 0.1 % (1σ) (instrument temperature constant ± 1 °C).
Accuracy: (VSRCErr + IMEASErr x R)/VALT
ΔIBG is a measured, typical background current noise from the sample and fixture.
VALT is the alternating polarity voltage used.
VSRCErr is the accuracy (in volts) of the voltage source using VALT as the setting.
IMEASErr is the accuracy (in amperes) of the ammeter using VALT/R as the reading.
VOLTAGE SOURCE
| Range | 5½-digit resolution | Accuracy (1 year) 18 °C to 28 °C ± (% reading + offset) |
Temperature coefficient 0 °C to 18 °C and 28 °C to 50 °C ± (% reading + offset)/ °C |
| 100 V | 5 mV | 0.15 +10 mV | 0.005 + 1 mV |
| 1000 V | 50 mV | 0.15 +100 mV | 0.005 + 10 mV |
Maximum output current:
100 V range: ± 10 mA, hardware short circuit protection at < 14.0 mA
1000 V range: ± 1 mA, hardware short circuit protection at < 1.4 mA
Settling time:
100 V range: < 8 ms to rated accuracy
1000 V range: < 50 ms to rated accuracy
Noise (typical): 10 Hz to 20 Mhz
100 V range: < 4.7 mVRMS
1000 V range: < 5.1 mVRMS
TEMPERATURE (THERMOCOUPLE)
| Thermocouple type | Range | Accuracy (1 year)8 18 °C to 28 °C, ± (% reading + °C) |
| K | −25 °C to 150 °C | ± (0.3 + 1.5 °C) |
HUMIDITY
| Range | Accuracy (1 year)9 18 °C to 28 °C, ± (% reading + % relative humidity) |
| 0% to 100% | ± (0.3 + 0.5 °C) |
9 Humidity probe accuracy must be added. This is ± 3 % relative humidity, for Model 6517-RH, up to 65 °C probe environment, not to exceed 85 °C.
IEEE-488 BUS IMPLEMENTATION
Implementation: SCPI (IEEE-488.2, SCPI-1999.0)
Trigger to reading done: 150 ms typical, with external trigger
RS-232 implementation: Supports: SCPI 1991.0; baud rates: 300, 600, 1200, 2400, 4800, 9600, 19.2 k, 38.4 k, 57.6 k, and 115.2 k
Flow control: None, Xon/Xoff
Connector: DB-9 TXD/RXD/GND
GENERAL
Display: 6½-digit vacuum fluorescent multiline
Overrange indication: Display reads "OVERFLOW”; for readings > 105 % of range, the display reads "OUT OF LIMIT" for excessive overrange conditions
Ranging: Automatic or manual
Conversion time: Selectable 0.01 PLC to 10 PLC
Programs: Provide front-panel access to IEEE address, choice of engineering units or scientific notation
Maximum input: 250 VPEAK, DC to 60 Hz sine wave; 10 s per minute maximum on mA ranges (one-sixth duty cycle)
Maximum common mode voltage (DC to 60 Hz sine wave): Electrometer, 500 VPEAK; V-source, 750 VPEAK
Isolation (meter COMMON to chassis): > 1010 Ω, < 500 pF
Input connector: Three-lug triaxial on rear panel
2 V analog output: 2 V for full range input; noninverting in volts mode, inverting when measuring amperes, ohms, or coulombs; output impedance 10 kΩ nominal
Preamplifier output: Provides a guard output for voltage measurements; can be used as an inverting output or with external feedback in Amps and Coulombs modes
External trigger: TTL-compatible external trigger and electrometer complete
Guard: Switchable voltage guard available
Digital I/O and trigger line: Available, see manual for usage
EMC: Conforms to European Union Directive 89/336/EEC, EN 61326-1
Safety: Conforms to European Union Directive 73/23/EEC, EN 61010-1
Test sequences: Device-characterization (diode, capacitor, cable, resistor), resistivity, surface-insulation resistance, sweep
Reading storage: 50,000
READING RATE:
| To internal buffer | 425 | readings/second11 |
| To IEEE-488 bus | 400 | readings/second10, 11 |
| Bus transfer | 3300 | readings/second11 |
10 0.01 PLC, digital filters off, front panel off, temperature + relative humidity off, line sync off.
11 Binary transfer mode.
Digital filter: Median and averaging
Environment: Operating: 0 °C to 50 °C; relative humidity 70% noncondensing, up to 35 °C; storage: –25 °C to +65 °C; for indoor use only
Altitude: Maximum 2000 m (6562 ft) above sea level per EN61010-1
Warm-up: 1 hour to rated accuracy (see manual for recommended procedure)
Power: User selectable 100 V ac, 120 V ac, 220 V ac, 240 V ac, 50 Hz/60 Hz, 100 VA maximum
PHYSICAL
Case dimensions: 90 mm × 214 mm × 369 mm (3½ in. × 8½ in. × 14½ in.)
Working dimensions: From front of case to rear, including power cord and IEEE-488 connector: 394 mm (15.5 in.)
Net weight: 5.4 kg (11.8 lbs)
Shipping weight: 6.9 kg (15.1 lbs)
Find more valuable resources at TEK.COM
Copyright © Tektronix. All rights reserved. Tektronix products are covered by U.S. and foreign patents, issued and pending. Information in this publication supersedes that in all previously published material. Specification and price change privileges reserved. TEKTRONIX and TEK are registered trademarks of Tektronix, Inc. All other trade names referenced are the service marks, trademarks or registered trademarks of their respective companies.
SPEC-6517B March 2020